Richard Soref: The new frontiers of silicon photonics
Interview 4: Professor Richard Soref
John Bowers acknowledges him with ‘kicking off’ silicon photonics some 30 years ago, while Andrew Rickman refers to him as the ‘founding father of silicon photonics’. An interview with Richard Soref.

It was fibre-optic communications that started Professor Richard Soref on the path to silicon photonics.
“In 1985, the only photonic chip that could interface to fibre was the III-V semiconductor chip,” says Soref. He wondered if an elemental chip such as silicon could be used, and whether it might even do a better job. He had read in a textbook that silicon is relatively transparent at the 1.30-micron and 1.55-micron wavelengths used for telecom and it inspired him to look at silicon as a material for optical waveguides.
Soref's interest in silicon was a combination of the potential of using the chip industry’s advanced manufacturing infrastructure for electro-optical integration and his own interest in materials. “I’m a science guy and I have curiosity and fascination with what the world of materials offers,” he says. “If I have an avenue like that, I like to explore where the physics takes us.”
In 1985 Soref constructed and did experiments on waveguides based on un-doped silicon resting upon a doped silicon substrate. It turned out not to be the best choice for a waveguide and in 1986 Soref proposed using a silicon-on-insulator waveguide instead, what has become the mainstream approach for the silicon photonics industry.
Silicon-on-insulator had a far greater refractive index contrast between the waveguide core and its cladding and is far less lossy. And while Soref didn’t build such structures, “it stimulated others to develop that major, major waveguide, so I’m proud of that”.
The original waveguide idea was not a wasted one, though. Soref and then research assistant, Brian Bennett, used the undoped-on-doped silicon waveguide structure to study and quantify free-carrier electro-modulation effects. These effects underpin the workings of the bulk of current silicon photonic modulators. Soref says their published academic paper has since been cited over 1,800 times.
Soref is approaching his 80th birthday and is a research professor at the University of Massachusetts in Boston. He has spent over 50 years researching photonics, silicon photonics and the broader topic of mid-infrared wavelengths and Group IV photonics, as well as spending five years researching liquid crystals for displays and electro-optical switching. For 27 years he was employed at the Air Force Research Laboratory. He has also worked at the Sperry Research Center and the MIT Lincoln Laboratory.
Applications go beyond telecom and optical interconnect, and perhaps the most important application is sensing
Group IV photonics
Soref’s research interests are broad as part of his fundamental interest in material science. In more recent years he has focused on Group IV photonics but not exclusively so.
The term silicon-photonics is firmly entrenched in the global community, he says, a phrase that includes on-chip germanium photo-detectors and even, with heterogeneous integration, III-V materials. Group IV photonics is a superset of silicon photonics and includes silicon-germanium-tin materials (SiGeSn) and well as silicon carbide. Such materials will likely be used in the monolithic silicon chip of the future, he says.
He has published papers on alloys such as silicon germanium carbon and silicon germanium tin. “I was estimating what these never-before-seen materials would do; you could create new alloys and how would those alloys behave,” says Soref.
Silicon germanium tin offers the possibility of a direct bandgap light emitter. “It is a richer material science space, with independent control of the bandgap and the lattice parameter,” says Soref.
Adding tin to the alloy lengthens the wavelength of operation, typically in the 1.5-micron to 5-micron range, the near infra-red and part of the mid infra-red part of the spectrum. “Applications go beyond telecom and optical interconnect, and perhaps the most important application is sensing,” says Soref.
The applications in this wavelength range include system-on-a-chip, lab-on-a-chip, sensor-on-a-chip and sensor-fusion-on-a-chip for such applications as chemical, biological, medical and environmental sensing. Such sensor chips could be in your smartphone and play an important role in the emerging Internet of Things (IoT). “Sensing could be a very important economic foundation for Group IV photonics,” says Soref.
And Soref does not stop there. He is writing a paper on Group III nitrides for ultra violet and visible-light integrated photonics: “I think silicon and Group IV are limited to the near-, mid- and longwave infra red”.
Challenges
Soref points to the work being done in developing commercial high-volume manufacturing: the use of 300mm silicon wafers, developing process libraries and perfecting devices for volume manufacturing. He welcomes AIM Photonics, the US public-private venture investing $610 million in photonics and manufacturing.
But he argues that there should also be an intellectual space for growth, “a wider space which is not so practical but which will become practical”. He cites the emerging areas of sensing and microwave photonics. “That is the frontier,” says Soref. “And the foundry work should not prevent that intellectual exploration.”
An important application area for microwave photonics is wireless, from 5GHz to 90GHz. Soref envisages a photonic integrated circuit (PIC), or an opto-electronic IC (OEIC) that features electronics and optics on-chip, that communicates with other entities often via fibre but also wirelessly.
“That means RF (radio frequency) or microwave, and for microwave that requires a transmitter and receiver on the chip,” says Soref. Such a device would find use in the IoT and future smartphones.
Microwave designs in the past used an assemblage of discrete components that makes a system on a board. These new microwave PICs or OEICs could perform many of the classical functions such as spectral analysis, optical control of a phased array microwave antenna, microwave signal processing, and optical analogue to digital conversion (ADC) and optical digital to analogue conversion (DAC).
This is analogous to the convergence of computing and photonics, says Soref. In computing, the signal goes from the electrical domain to the optical and back, while for microwave photonics it will be conversions between the microwave and photonic domains on the chip.
There are also quantum-photonic applications: quantum computing, quantum cryptography and quantum metrology where photonic devices could play a role.
Opportunities
These are the three emerging opportunities areas Soref foresees for Group IV photonics emerging in the next decade: sensors, microwave photonics and the quantum and computing worlds in addition to the existing markets of telecom and optical interconnect.
Soref is not sure that silicon photonics has yet reached its tipping point. “To make silicon photonics and Group IV photonics ubiquitous and pervasive, it takes a lot of investment and a lot of commercial results,” he says. “We have not yet arrived at that stage of economic foundation.”
New optical devices
Soref also highlights how continual advances in CMOS feature size, from 45nm down to 7nm, promise new photonic components that could become commonplace.
Soref cites the example of a silicon-on-isolator nanobeam. The nanobeam is a strip waveguide with air holes, in effect a one-dimensional photonic crystal lattice in a waveguide.
The nanobeam structure is of interest as it performs the same role as the micro-ring resonator, a useful optical building block used in such applications as modulation.
“The photonic crystal structure requires extreme control of dimensions to reduce unwanted scattering, so it needs very fine lithography,” says Soref. People have argued such structures are impractical due to the unrealistic dimensional control needed.
“But foundries have shown you can get a very high-quality photonic crystal in a silicon fab,” he explains. “This foundry advantage would enable new components that might have seemed too difficult or marginal on paper.”
Significant progress in silicon photonics may have been achieved since his first work in 1985, but as Soref highlights, it is still early when assessing the full significance of the technology.
Imec gears up for the Internet of Things economy
It is the imec's CEO's first trip to Israel and around us the room is being prepared for an afternoon of presentations the Belgium nanoelectronics research centre will give on its work in such areas as the Internet of Things and 5G wireless to an audience of Israeli start-ups and entrepreneurs.
Luc Van den hove
iMinds merger
Imec announced in February its plan to merge with iMinds, a Belgium research centre specialising in systems software and security, a move that will add 1,000 staff to imec's 2,500 researchers.
At first glance, the world-renown semiconductor process technology R&D centre joining forces with a systems house is a surprising move. But for Van den hove, it is a natural development as the company continues to grow from its technology origins to include systems-based research.
"Over the last 15 years we have built up more activities at the system level," he says. "These include everything related to the Internet of Things - our wireless and sensor programmes; we have a very strong programme on biomedical applications, which we sometimes refer to as the Internet of Healthy Things - wearable and diagnostics devices, but always leveraging our core competency in process technology."
Imec is also active in energy research: solar cells, power devices and now battery technology.
For many of these systems R&D programmes, an increasing challenge is managing data. "If we think about wearable devices, they collect data all the time, so we need to build up expertise in data fusion and data science topics," says Van den hove. There is also the issue of data security, especially regarding personal medical data. Many security solutions are embedded in software, says Van den hove, but hardware also plays a role.
Imec expects the Internet of Things to generate massive amounts of data, and more and more intelligence will need to be embedded at different levels in the network
"It just so happens that next to imec we have iMinds, a research centre that has top expertise in these areas [data and security]," says Van den hove. "Rather than compete with them, we felt it made more sense to just merge."
The merger also reflects the emergence of the Internet of Things economy, he says, where not only will there be software development but also hardware innovation: "You need much more hardware-software co-development". The merger is expected to be completed in the summer.
Internet of Things
Imec expects the Internet of Things to generate massive amounts of data, and more and more intelligence will need to be embedded at different levels in the network.
"Some people refer to it as the fog - you have the cloud and then the fog, which brings more data processing into the lower parts of the network," says Van den hove. "We refer to it as the Intuitive Internet of Things with intelligence being built into the sensor nodes, and these nodes will understand what the user needs; it is more than just measuring and sending everything to the cloud."
Van den hove says some in the industry believe that these sensors will be made in cheap, older-generation chip technologies and that processing will be performed in data centres. "We don't think so," he says. "And as we build in more intelligence, the sensors will need more sophisticated semiconductors."
Imec's belief is that the Internet of Things will be a driver for the full spectrum of semiconductor technologies. "This includes the high-end [process] nodes, not only for servers but for sophisticated sensors," he says.
"In the previous waves of innovation, you had the big companies dominating everything," he says. "With the Internet of Things, we are going to address so many different markets - all the industrial sectors will get innovation from the Internet of Things." There will be opportunities for the big players but there will also be many niche markets addressed by start-ups and small to medium enterprises.
Imec's trip to Israel is in response to the country's many start-ups and its entrepreneurship. "Especially now with our wish to be more active in the Internet of Things, we are going to work more with start-ups and support them," he says. "I believe Israel is an extremely interesting area for us in the broad scope of the Internet of Things: in wireless and all these new applications."
Herzliya
Semiconductor roadmap
Van den hove's background is in semiconductor process technology. He highlights the consolidation going on in the chip industry due, in part, to the CMOS feature nodes becoming more complex and requiring greater R&D expenditure to develop, but this is a story he has heard throughout his career.
"It always becomes more difficult - that is Moore's law - and [chip] volumes compensate for those challenges," says Van den hove. When he started his career 30 years ago the outlook was that Moore's law would end in 10 years' time. "If I talk to my core CMOS experts, the outlook is still 10 years," he says.
Imec is working on 7nm, 5nm and 3nm feature-size CMOS process technologies. "We see a clear roadmap to get there," he says. He expects the third dimension and stacking will be used more extensively, but he does not foresee the need for new materials like graphene or carbon nanotubes being used for the 3nm process node.
Imec is pursuing finFET transistor technology and this could be turned 90 degrees to become a vertical nanowire, he says. "But this is going to be based on silicon and maybe some compound semiconductors like germanium and III-V materials added on top of silicon." The imec CEO believes carbon-based materials will appear only after 3nm.
"The one thing that has to happen is that we have a cost-effective lithography technique and so EUV [extreme ultraviolet lithography] needs to make progress," he says. Here too he is upbeat pointing to the significant progress made in this area in the last year. "I think we are now very close to real introduction and manufacturing," he says.
We see strong [silicon photonics] opportunities for optical interconnect and that is one of our biggest activities, but also sensor technology, particularly in the medical domain
Silicon Photonics
Silicon photonics is another active research area with some 200 staff at imec and at its associated laboratory at Ghent university. "We see strong opportunities for optical interconnect and that is one of our biggest activities, but also sensor technology, particularly in the medical domain," he says.
Imec views silicon photonics as an evolutionary technology. "Photonics is being used at a certain level of a system now and, step by step, it will get closer to the chip," he says. "We are focussing more on when it will be on the board and on the chip."
Van den hove talks about integrating the photonics on a silicon interposer platform to create a cost-effective solution for the printed circuit board and chip levels. For him, first applications of such technology will be at the highest-end technologies of the data centre.
For biomedical sensors, silicon photonics is a very good detector technology. "You can grow molecules on top of the photonic components and by shining light through them you can perform spectroscopy; the solution is extremely sensitive and we are using it for many biomedical applications," he says.
Looking forward, what most excites Van den hove is the opportunity semiconductor technology has to bring innovation to so many industrial sectors: "Semiconductors have created a fantastic revolution is the way we communicate and compute but now we have an opportunity to bring innovation to nearly all segments of industry".
He cites medical applications as one example. "We all know people that have suffered from cancer in our family, if we can make a device that would detect cancer at a very early stage, it would have an enormous impact on our lives."
Van den hove says that while semiconductors is a mature technology, what is happening now is that semiconductors will miniaturise some of the diagnostics devices just like has happened with the cellular phone.
"We are developing a single chip that will allow us to do a full blood analysis in 10 minutes," he says. DNA sequencing will also become a routine procedure when visiting a doctor. "That is all going to be enabled by semiconductor technology."
Such developments is also a reflection of how various technologies are coming together: the combination of photonics with semiconductors, and the computing now available.
Imec is developing a disposable chip designed to find tumour cells in the blood that requires the analysis of thousands of images per second. "The chip is disposable but the calculations will be done on a computer, but it is only with the most advanced technology that you can do that," says Van den hove.
